Reticle SMIF Pods

RSP-150

The RSP-150 is an advanced reticle handling system providing high performance during storage and transport

The RSP-150 features:

• 150 mm reticle size
• Better than Class 1 internal environment
• Automation compatible
• Metal-free design minimizes contamination
• Multiple ESD paths to ground
• Cleanable without disassembly
• Streamlined design allows much higher storage density
• Secure reticle retention allows transport as well as storage
• Fully compatible with older generation pods