Reticle SMIF Pods

SRP-150SD

The SRP-150SD is an advanced reticle handling system providing superior performance during storage and transport.

The SRP-150SD features:

• 150 mm reticle size
• Better than Class 1 internal environment
• Automation compatibility
• Top structure reduces opportunity for reticle damage due to accidental shock or drop
• Multiple ESD paths to ground
• Easy to clean and maintain
• Secure reticle retention allows transport as well as storage
• Reusable