Reticle SMIF Pods

RSP-200

The RSP-200 provides high-reliability handling of 150 mm or 200 mm masks and reticles with or without pellicles.

The RSP-200 features:

• 200 mm SMIF interface
• Inert gas purge
• Designed to minimize UV light
• Easy to clean and maintain with integral purge valves
• Info pads reduce opportunity for misalignment