300 MM Open Process Carriers

Process Enhancement Wafer Carriers

Superior Automation Performance

• Open flow carrier allows solutions to pass through evenly and quickly
• One-half the volume and mass of traditional process carriers
• One-fourth the surface area of traditional process carriers
• Modular construction includes reinforcement rods for added rigidity and strength
• Lift points on carrier ends for automated handling
• V-notch locators on carrier ends and rails for location on equipment
• Chemical resistant PFA material wetted surface