200mm Wafer Handling Systems
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198/192 Series Wafer Transport Carriers

 

 200mm Wafer Processing Carriers (Using in Fab)

 

198/192 Series Wafer Transport Carriers

The industry standard 200mm wafer carrier

 

Advanced Wafer Transport

 

Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today’s advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers, including:

 

  • Precise wafer access – the wafer is in a precise and predictable location
  • Reliable equipment operation – on process tools and automated materials handling systems
  • Secure wafer protection – from contamination and damage  

Material Specifications

STAT-PRO® 3000

  • Advanced wafer transport carrier material
  • Static dissipative blend of polyetheretherketone (PEEK™) and carbon fiber
  • Temperature limits:
  • Continuous use: 120°C
  • Wafer insertion: 340°C

 

STAT-PRO® 100

  • Wafer transport carrier material
  • Static dissipative blend of polypropylene and carbon powder
  • Temperature limits:
  • Continuous use: 55°C
  • Wafer insertion: 70°C

Blue Polypropylene

  • Wafer transport carrier material
  • Temperature limits:
  • Continuous use: 55°C
  • Wafer insertion: 70°C