200mm Wafer Handling Systems
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20X Series Wafer Transport Carriers

 200mm Wafer Processing Carriers (Using in Fab)

 

 20X Series Wafer Transport Carriers

High performance in a closed side wall configuration

 

 

Advanced Wafer Transport

 

Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today’s advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers, including:

 

  • Precise wafer access – the wafer is in a precise and predictable location
  • Reliable equipment operation – on process tools and automated materials handling systems
  • Secure wafer protection – from contamination and damage  

Material Specifications

STAT-PRO® 3000

  • Advanced wafer transport carrier material
  • Static dissipative blend of polyetheretherketone PEEK™ and carbon fiber
  • Temperature limits:
  • Continuous use: 120°C
  • Wafer insertion: 340°C

 

EMSTAT™ AR+

  • Wafer transport carrier material
  • Static dissipative blend of polypropylene, carbon powder and PTFE
  • Temperature limits:
  • Continuous use: 55°C
  • Wafer insertion: 70°C