200mm Wafer Processing Carriers (Using in Fab)

200 Series 200mm Wafer Transport Carriers

Reliable performance for automated material handling system (AMHS) applications

Advanced Wafer Transport

Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today’s advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers, including:

• Precise wafer access – the wafer is in a precise and predictable location
• Reliable equipment operation – on process tools and automated materials handling systems
• Secure wafer protection – from contamination and damage

General Specifications

• Open side wall style (unless noted)
• Locating track notches at the center of the thirteenth pocket
• Pins and holes on the top rail (unless noted)
• Wafer capacity: 25 (unless noted)
• D1 dimension: 25.4mm (1.00")
• Pocket spacing: 6.4mm (0.25")
• Pocket flat: 1.8mm (0.07") 

Material Specifications

STAT-PRO® 3000

• Advanced wafer transport carrier material
• Static dissipative blend of polyetheretherketone PEEK™ and carbon fiber
• Temperature limits:
• Continuous use: 120°C
• Wafer insertion: 340°C

STAT-PRO^® 100

• Wafer transport carrier material
• Static dissipative blend of polypropylene and carbon powder