M20X Series 200 MM Pods

Advanced Wafer Isolation

Trends in wafer processing technology have mandated advancements in wafer handling technology to support today’s advanced semiconductor processing facilities. Advanced wafer isolation pods provide wafer isolation, and coupled with advanced wafer transport carriers, offer performance benefits over traditional wafer carriers and storage boxes, including:

• Reliable wafer isolation – in a controlled minienvironment
• Secure wafer protection – from electrostatic discharge, damage and contamination
• Precise equipment operation and wafer access – on process tools and AMHS

The M20X Series 200mm Pod is a component of Silicon Delivery™ Systems and Services – Entegris’ unique materials integrity management solution to cost effectively manage silicon from production to consumption. This offering brings together wafer and device handling systems and services into a customized, coordinated package that works for you.