150 mm Wafer Handling Systems
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194/196/182 Series Transport Wafer Carriers

 

150mm Transport Wafer Carriers

 

 

The 194/196 Series

Superior automation performance

  • High rigidity and dimensional stability
  • Four-point contact on the "H" bar and track for improved wafer positioning
  • Open sidewall style
  • High profile design for maximum wafer protection
  • Locating track notches for the center of the thirteenth pocket
  • "H" bar equipment interface
  • Pins and holes on the top rail

 

182 Series

The industry standard 150mm wafer carrier

 

  • High rigidity and dimensional stability
  • Four-point contact on the "H" bar and track for improved wafer positioning (unless noted)
  • Open sidewall style
  • High profile design for maximum wafer protection
  • Locating track notches for the center of the thirteenth pocket (unless noted)
  • "H" bar equipment interface
  • Pins and holes on the top rail