150 mm Wafer Handling Systems
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194/190/182 Series Process Wafer Carriers

 

150mm Process Wafer Carriers (PFA)

 

194 Series

Superior process carrier automation performance

  • Improved process carrier rigidity and dimensional stability
  • Four-point contact on the "H" bar and track for improved wafer positioning
  • Open sidewall design to minimize liquid traps and promote even solution coverage and drainage
  • High profile design for maximum wafer protection
  • Locating track notches for the center of the thirteenth pocket
  • "H" bar equipment interface
  • Pins and holes on the top rail
  • Chemical resistant natural PFA material

190 Series

Low profile for optimum performance in centrifugal applications

  • Low contour for improved spray penetration to the wafers
  • Open sidewall design to minimize liquid traps and promote even solution coverage and drainage
  • "H" bar equipment interface
  • Pins and holes on the top rail
  • Chemical resistant natural PFA material

 

182 Series

The industry standard 150mm process wafer carrier

  • Four-point contact on the "H" bar for improved wafer positioning
  • Open sidewall design to minimize liquid traps and promote even solution coverage and drainage
  • High profile design for maximum wafer protection
  • "H" bar equipment interface
  • Pins and holes on the top rail
  • Chemical resistant natural PFA material