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                               150 mm Wafer Handling Systems
                                 Home > Products > Entegris Micro Electronic Products > 150 mm Wafer Handling Systems > 150 mm Storage Boxes
                              150 mm Storage Boxes
                              • 150 mm Storage Boxes
                              • 150 mm Storage Boxes(H3150 Series)
                              150 mm Storage Boxes

                               

                               

                              150mm Storage Boxes

                              E160 Series

                              Optimum performance and reduced particle generation

                              • Five degree wafer tilt from wafers vertical allows wafers to rest on their backsides, reducing movement and particle generation
                              • Smooth surfaces for easy cleaning and low particle generation
                              • Pin and socket hinges with retainers for improved durability
                              • Stackable
                              • Single carrier capacity
                              • Compatible carriers: All 25-capacity without handles

                               

                              E124 Series

                              The industry standard 150mm storage box

                              • Automation compatible
                              • Smooth surfaces for easy cleaning and low particle generation
                              • Drop front allows easy access by robotic end effectors
                              • Robotic compatible slide latch
                              • Rotating pin and socket hinges prevent box from tipping when open
                              • Stackable
                              • Single carrier capacity
                              • Compatible carriers: All 25-capacity without handles

                              E90 Series

                              Maximum stacking density for space limited stockers and WIP racks

                              • Smooth bottom
                              • Pin and socket hinges
                              • Stackable
                              • Single carrier capacity
                              • Compatible carriers: 182 series and 194/196 series 25-capacity without handles

                              E206 Series

                              Reduced particle generation and enhanced robotic interface

                              • Automation compatible
                              • Twenty degree wafer tilt from wafers horizontal allows wafers to rest on their backsides, reducing movement and particle generation
                              • Smooth surfaces for easy cleaning and low particle generation
                              • Keyed pin and socket hinges are free rotating and easy to assemble and disassemble
                              • Stackable
                              • Two carrier capacity
                              • Compatible carriers: All 25-capacity without handles except A190 series low profile process carriers

                               

                              H3150 Series

                              Optimum performance and high storage density

                              • Five degree wafer tilt from wafers vertical (unless noted) allows wafers to rest on their backsides, reducing movement and particle generation
                              • Smooth surfaces for easy cleaning and low particle generation
                              • Low profile base allows easy access to wafer carrier end wall flanges
                              • Rotating pin and socket hinges prevent box from tipping when open
                              • Stackable (unless noted)
                              • Two carrier capacity

                               

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