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150 mm Wafer Handling Systems |
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150 mm Storage Boxes![]() |
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150mm Storage Boxes
E160 Series
Optimum performance and reduced particle generation
- Five degree wafer tilt from wafers vertical allows wafers to rest on their backsides, reducing movement and particle generation
- Smooth surfaces for easy cleaning and low particle generation
- Pin and socket hinges with retainers for improved durability
- Stackable
- Single carrier capacity
- Compatible carriers: All 25-capacity without handles
E124 Series
The industry standard 150mm storage box
- Automation compatible
- Smooth surfaces for easy cleaning and low particle generation
- Drop front allows easy access by robotic end effectors
- Robotic compatible slide latch
- Rotating pin and socket hinges prevent box from tipping when open
- Stackable
- Single carrier capacity
- Compatible carriers: All 25-capacity without handles
E90 Series
Maximum stacking density for space limited stockers and WIP racks
- Smooth bottom
- Pin and socket hinges
- Stackable
- Single carrier capacity
- Compatible carriers: 182 series and 194/196 series 25-capacity without handles
E206 Series
Reduced particle generation and enhanced robotic interface
- Automation compatible
- Twenty degree wafer tilt from wafers horizontal allows wafers to rest on their backsides, reducing movement and particle generation
- Smooth surfaces for easy cleaning and low particle generation
- Keyed pin and socket hinges are free rotating and easy to assemble and disassemble
- Stackable
- Two carrier capacity
- Compatible carriers: All 25-capacity without handles except A190 series low profile process carriers
H3150 Series
Optimum performance and high storage density
- Five degree wafer tilt from wafers vertical (unless noted) allows wafers to rest on their backsides, reducing movement and particle generation
- Smooth surfaces for easy cleaning and low particle generation
- Low profile base allows easy access to wafer carrier end wall flanges
- Rotating pin and socket hinges prevent box from tipping when open
- Stackable (unless noted)
- Two carrier capacity