150 mm Wafer Handling Systems
150mm SMIF Pod

 

150mm SMIF Pod

 

 

The 150 mm SMIF Pod safely transports and protects 150 mm wafers during processing.

The 150 mm Pod features:

  • Better than Class 1 internal environment
  • Fully automation compatible
  • Thermo-elastomeric door seal gasket for exceptional sealing
  • Easy to clean and maintain
  • Waferlock™ system minimizes particulation and static charge
  • Breather filter
  • Compatible with 100 mm, 125 mm and 150 mm cassettes