Mask Packages

H68 Series

• For masks or reticles with pellicles

• Minimal contact

• Easy to open and close

• Easy removal

• Seal security for protection

• Compact and stackable

• Roller hinge minimizes particle generation

• Optional latch security clip available

H91 Series

• For masks or reticles with pellicles

• End-loading door easy to open and close

• Seal securely for protection

• Compatible with GCA steppers

• Stackable

• Top flips for easy cleaning

• Available precleaned at an additional price

 

H60 Series

• Holds one mask or reticle

• Manufactured and packaged in a cleanroom environment

• Bagged and sealed in a cleanroom bag and heat sealed in a second polyethylene bag

• Living hinge

• Compact and stackable

• Dust-proof

 

H92 Series

• Provides excellent security for masks or reticles with pellicles

• High impact resistance

• Stackable

• Easy to open and close

• Seal securely to provide a protective environment inside

• Label wall for identification label

• Additional materials and packages may be available on a special order basis

 

B80 Series

• Provide excellent security for masks and reticles with pellicles

• High impact resistance

• Stackable

• Easy to open and close

• Seal securely to provide a protective environment inside

• Additional materials and packages may be available on a special order basis