Filter Housings
Chemgard U-Line Housings

 Overview

Entegris’ ChemgardTM U-line housing, manufactured with Teflon® fluoropolymer resin, is designed to meet the high-purity standards for process fluids used in the semiconductor industry. The Chemgard U-line housing’s unique design allows it to be plumbed into extremely small spaces. In addition, its durable construction and leakproof design ensure efficient integration into the fab. With the inlet and outlet on the top of the head of the housing, the Chemgard U-line housing can be utilized in corners, in compact manifold systems or areas where space is critical. When wet bench space is at a minimum, the U-line offers the proven reliability of the Chemgard U-line housing in a vertical head design.

 連結至 Entegris Inc.

Accommodates a Wide Range of Filters

The Chemgard U-line housing is offered in 5," 10," 12" and 20" bowl lengths to accommodate most filters manufactured by Entegris, including the QuickChange® and GuardianTM filter families. The Chemgard U-line housings are available with Flaretek® fitting compatible inlet and outlet connections for simple and quick installation and removal.

 

Specifications:

Materials:

Head, bowl and plug Teflon PFA 440 HP

O-ring Viton® fluoroelastomer encapsulated

with Teflon fluoropolymer resin (2-344)

Locking ring PVDF (nonwetted part)

Connections:

3⁄4” Flaretek fitting compatible inlet and outlet

1⁄4” Flaretek fitting compatible vent and drain

Code 0 2-222 o-ring cartridge connections

Maximum operating

conditions:

Maximum inlet pressure 0.3 MPa (3.0 bar, 43 psi) @ 100°C

0.75 MPa (7.5 bar, 110 psi) @ 25°C

Maximum operating temperature 100°C (212°F)