300 mm Wafer Handling Systems
300 MM Open Process Carriers

12吋特殊製程晶舟盒

 

Process Enhancement Wafer Carriers

Superior Automation Performance

  • Open flow carrier allows solutions to pass through evenly and quickly
  • One-half the volume and mass of traditional process carriers
  • One-fourth the surface area of traditional process carriers
  • Modular construction includes reinforcement rods for added rigidity and strength
  • Lift points on carrier ends for automated handling
  • V-notch locators on carrier ends and rails for location on equipment
  • Chemical resistant PFA material wetted surface