8吋Fab廠對廠傳輸運送晶舟盒

The Crystalpak® wafer shipping box and 25 capacity cassette provide clean and secure wafer transport, optimum automation interface and the highest overall output for your facility.

Clean and Secure Wafer Shipping Protection

The 2-piece Crystalpak® box is engineered to provide maximum protection for your 200mm wafers:

• Manufactured from dimensionally stable, ultrapure polycarbonate which is low in outgassing
• Removable gasket protects against external contamination
• Patented wafer suspension system minimizes wafer rotation and particle generation
• Ergonomic design ensures proper operator handling

Optimum Automation Performance

The Crystalpak® cassette incorporates a variety of features to provide reliable automation integration and interoperability:

• The only cassette on the market manufactured from polycarbonate, ensuring dimensional stability and accurate wafer plane
• SEMI^® standards compliant
• "H" bar ensures accurate equipment interface

Highest Overall Output For Your Facility

The Crystalpak® box, combined with the cassette, offers maximum wafer protection, optimum automation interface to improve your productivity and increase overall yield. The Crystalpak® wafer shipping box:

• Maximizes your wafer transfer throughput with precise wafer plane performance
• Maximizes tool and AMHS uptime and long-term reliability with a dimensionally stable cassette
• Is completely cleanable for reuse
• Is stackable for greater utilization of space
• Minimizes any contribution to contamination

Material Description

Polycarbonate material

Entegris’ ultrapure polycarbonate material is used in the box and cassette. This material offers:

• Low inorganics
• Low particle generation
• Low outgassing
• Dimensional stability