200mm Wafer Handling Systems
A200 G4 200 mm SMIF Pod

Wafer Isolation Pods

 

A200 G4 200 mm SMIF Pod

 

The 200 mm SMIF Pod safely transports and protects 200 mm wafers during processing.

 

The 200 mm SMIF Pod features:

  • Better than Class 1 internal environment
  • Fully automation compatible
  • Low particulation
  • Low outgassing
  • Long term reliability