6吋Fab廠內特殊製程承載晶舟盒(PFA)

194 Series

Superior process carrier automation performance

• Improved process carrier rigidity and dimensional stability
• Four-point contact on the "H" bar and track for improved wafer positioning
• Open sidewall design to minimize liquid traps and promote even solution coverage and drainage
• High profile design for maximum wafer protection
• Locating track notches for the center of the thirteenth pocket
• "H" bar equipment interface
• Pins and holes on the top rail
• Chemical resistant natural PFA material

190 Series

Low profile for optimum performance in centrifugal applications

• Low contour for improved spray penetration to the wafers
• Open sidewall design to minimize liquid traps and promote even solution coverage and drainage
• "H" bar equipment interface
• Pins and holes on the top rail
• Chemical resistant natural PFA material

182 Series

The industry standard 150mm process wafer carrier

• Four-point contact on the "H" bar for improved wafer positioning
• Open sidewall design to minimize liquid traps and promote even solution coverage and drainage
• High profile design for maximum wafer protection
• "H" bar equipment interface
• Pins and holes on the top rail
• Chemical resistant natural PFA material