6吋Fab廠內產品保護儲存晶舟盒

E160 Series

Optimum performance and reduced particle generation

• Five degree wafer tilt from wafers vertical allows wafers to rest on their backsides, reducing movement and particle generation
• Smooth surfaces for easy cleaning and low particle generation
• Pin and socket hinges with retainers for improved durability
• Stackable
• Single carrier capacity
• Compatible carriers: All 25-capacity without handles

E124 Series

The industry standard 150mm storage box

• Automation compatible
• Smooth surfaces for easy cleaning and low particle generation
• Drop front allows easy access by robotic end effectors
• Robotic compatible slide latch
• Rotating pin and socket hinges prevent box from tipping when open
• Stackable
• Single carrier capacity
• Compatible carriers: All 25-capacity without handles

E90 Series

Maximum stacking density for space limited stockers and WIP racks

• Smooth bottom
• Pin and socket hinges
• Stackable
• Single carrier capacity
• Compatible carriers: 182 series and 194/196 series 25-capacity without handles

E206 Series

Reduced particle generation and enhanced robotic interface

• Automation compatible
• Twenty degree wafer tilt from wafers horizontal allows wafers to rest on their backsides, reducing movement and particle generation
• Smooth surfaces for easy cleaning and low particle generation
• Keyed pin and socket hinges are free rotating and easy to assemble and disassemble
• Stackable
• Two carrier capacity
• Compatible carriers: All 25-capacity without handles except A190 series low profile process carriers

H3150 Series

Optimum performance and high storage density

• Five degree wafer tilt from wafers vertical (unless noted) allows wafers to rest on their backsides, reducing movement and particle generation
• Smooth surfaces for easy cleaning and low particle generation
• Low profile base allows easy access to wafer carrier end wall flanges
• Rotating pin and socket hinges prevent box from tipping when open
• Stackable (unless noted)
• Two carrier capacity