六吋Fab廠對廠傳輸運送晶舟盒

Ultrapak Series

• Individual horizontal cantilever springs limit wafer rotation to reduce particle contamination and also secure the wafers in the cassette to safeguard against breakage.
• Ultrapure polypropylene materials provide a clean shipping environment and assure low levels of condensable inorganics.
• Horizontal and vertical robotic pickup flanges on the cassette allow convenient handling.
• Center notch track alignment and "H" bar ensure accurate equipment interoperability both vertically and horizontally.