150mm SMIF Pod
The 150 mm SMIF Pod safely transports and protects 150 mm wafers during processing.
The 150 mm Pod features:
- Better than Class 1 internal environment
- Fully automation compatible
- Thermo-elastomeric door seal gasket for exceptional sealing
- Easy to clean and maintain
- Waferlock™ system minimizes particulation and static charge
- Breather filter
- Compatible with 100 mm, 125 mm and 150 mm cassettes