198/192 Series Wafer Transport Carriers
8吋Fab廠內晶圓承載晶舟盒
198/192 Series Wafer Transport Carriers
The industry standard 200mm wafer carrier
Advanced Wafer Transport
Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today’s advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers, including:
Material Specifications
STAT-PRO® 3000
STAT-PRO® 100
Blue Polypropylene
198/192 Series Wafer Transport Carriers
The industry standard 200mm wafer carrier
Advanced Wafer Transport
Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today’s advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers, including:
- Precise wafer access – the wafer is in a precise and predictable location
- Reliable equipment operation – on process tools and automated materials handling systems
- Secure wafer protection – from contamination and damage
Material Specifications
STAT-PRO® 3000
- Advanced wafer transport carrier material
- Static dissipative blend of polyetheretherketone (PEEK™) and carbon fiber
- Temperature limits:
- Continuous use: 120°C
- Wafer insertion: 340°C
STAT-PRO® 100
- Wafer transport carrier material
- Static dissipative blend of polypropylene and carbon powder
- Temperature limits:
- Continuous use: 55°C
- Wafer insertion: 70°C
Blue Polypropylene
- Wafer transport carrier material
- Temperature limits:
- Continuous use: 55°C
- Wafer insertion: 70°C