200 Series 200mm Wafer Transport Carriers
8吋Fab廠內晶圓承載之晶舟盒
20X Series Wafer Transport Carriers
High performance in a closed side wall configuration
Advanced Wafer Transport
Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today’s advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers, including:
Material Specifications
STAT-PRO® 3000
EMSTAT™ AR+
20X Series Wafer Transport Carriers
High performance in a closed side wall configuration
Advanced Wafer Transport
Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today’s advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers, including:
- Precise wafer access – the wafer is in a precise and predictable location
- Reliable equipment operation – on process tools and automated materials handling systems
- Secure wafer protection – from contamination and damage
Material Specifications
STAT-PRO® 3000
- Advanced wafer transport carrier material
- Static dissipative blend of polyetheretherketone PEEK™ and carbon fiber
- Temperature limits:
- Continuous use: 120°C
- Wafer insertion: 340°C
EMSTAT™ AR+
- Wafer transport carrier material
- Static dissipative blend of polypropylene, carbon powder and PTFE
- Temperature limits:
- Continuous use: 55°C
- Wafer insertion: 70°C