BPS-30
BPS-600
BPS-2000
BPS-30
BPS-600
BPS-2000

Levitronix BPS Series

Max Pressure From 1.5 bar to 6.9 bar
BPS Series From BPS-i30 to BPS-4000
Max Flow From 3.8 lpm to 280 lpm
Impeller rotated by magnetic levitation. No mechanism contact, no wearing.    
  • Purest Pump
  • Lower trace metal contamination
  • Lower shear design
  • Pulsation Free Flow
BKM Pump for advanced node
  • UPW/Chemical/Slurry 
Wide flow range option 
  • From 3.8 lpm to 280 lpm
No maintenance needed
Life time > 10+ years
Smaller foot print 
  • About 50% foot print of diaphragm pumps at similar lpm 
Low noise and vibration
Smart factory interface
  • Automate process control by integrating sensors for real-time feedback
返回頁面頂端